Entegris - Automated Oven Lab
- Design control and automation solution for Oven Lab which includes ovens used for microchips wafer gas purification and regeneration for the cleanroom.
- Improve the oven processing time and minimize the operator efforts.
- Design and program Siemens PLC system with HMI IPC platform to control the ovens and automate over two hundred recopies.
- Test the pilot system design in San Diego, and then in the facilities in Europe and Asia.
Project Description
Location: San Diego, California. USA
Project Scope: Build an automated clean room purifier oven for semiconductor manufactures such as Intel and others. The system will read product barcode and identify what recipe should be used for each product. The entire processes is automated and only requires putting the product in the oven, and taking it out once it is done.
This product was successful and became a standard system for all manufacturing facilities of Entegris in US, Germany, and Malaysia.
System Components:
Oven
Power Panel
Control Panel
Controlled valves.
Pressure and temperature sensors.
Pressure and temperature meters.
Automated Process
Based on the product barcode read the system will adjust a specific recipe that works with that specific product and control all temperature and pressure set values in addition to how long each process should go and the sequence of processes.
Communication Network
Each Infinite Control System system consist of 1 PLC, 1 HMI, and one Ethernet switch.